SECS/GEM Protocol

SECS/GEM & GEM300 are a set of communication protocols for semiconductor equipment and factory host. These standards are maintained by SEMI. While GEM300 refers to a set of communication standards for 300mm wafers, which are more than those for 200mm, SECS/GEM is used as a generic term for both 200 and 300mm communication protocols and other automation standards. More Information please visit