We're looking for a vacuum sensor that can measure vacuum less than 0.0001 (10^-4) torr. It will be used in a fairly clean application. Can anyone make a recommendation?

 

Use a DP XTR that you calibrate appropriately.

 

That's ion gauge territory.

Regards

cww

 

Cold Cathode & Hot cathode gauges are normally used as sensors in this range. They normally have their dedicated controller units (a box
containing power & control electronics). Better, contact companies involved in this field to select a particular one for your application.

Pravin/ CAT/ India

 

you can try one from Edward's in UK

vikram pungaliya
primecontrols, pune ,india