What software is used for creating this logic diagrams or similar?

These look like CAD created logic diagrams, maybe if the screenshot panned down there would be a drawing number and drawing title. We used to create them in the 1980/90's.
Does anybody know what software is used for creating these logic diagrams? May be you know similar software, I'd be grateful for advice.

These can be called PFUP for Processs functionnal plan...I Worked many times with them back in days when i was at Alstom Power ...

Each OEM/vendor got his own software for such task ...I guess that Visio/CAD can be used ..or specific software with "Trame/Model/cartridge " inserted ....

You better ask your supplier of these documents ...they better placed to give you an advise...