Hi, we have AGV kind of machine running on plain surface rail. because of plain surface movement we facing position accuracy issues. anyone kindly let me know how to get 0.1mm accuracy in this case.

 

There is a recent Control.com article on this issue.
https://control.com/technical-articles/mechanical-motion-fluid-vs-electric-actuators/

It must be 20years ago I used Emerson electrical actuators on a worm screw giving resolution around 100 ångström units. The maximum movement I believe was 100mm.