Aerotech’s Hexgen HEX150-125HL Hexapod Delivers Accurate Positioning

Aerotech recently released a new miniature positioning system. The Hexgen HEX150-125HL provides precision alignment and positioning along six degrees of articulation. The HEX150-125HL was developed to serve the semiconductor, aerospace, and optics industries.

The Aerotech Hexgen HEX150-125HL hexapod positioning system. Image used courtesy of Aerotech

Precision Alignment

In order to achieve the most precise measurements, a good multi-axis device can move quickly and reach the same position repeatedly. Motion is controlled from both position and angular measurements through coordinated motion of multiple servo motors. While the math behind positioning may be complicated, a good positioner will be controlled through an intuitive interface such that an operator can quickly program positions or motions, and the stage can move as needed.

The HEX150-125HL

This hexapod allows multi-axis, precision motion in a compact size. It has industry-leading peak-to-peak repeatability, with incremental motion as small as 15 nm or 0.04 arc seconds. The high resolution makes it suitable for laser alignment, semiconductor wafer inspection, and other demanding tasks. Besides the tiny steps, it can move as fast as 30 mm/s (8 mm/s on the Z-axis) or 30°/s, meaning it can drastically increase quality assurance throughput, as each item can be inspected quickly. Furthermore, the platform can support loads up to 12 kg, making it powerful, accurate, and fast.

Physical Specifications

Mechanically, the HEX150-125HL runs on ball screw, brushless servo motors for smooth, accurate movements. Non-contact incremental encoders are used to provide feedback for motion control. To prevent damage, 5V limit switches are placed on the ends of each strut that will keep the motor running only to the device’s range of motion.

The base is 150 mm in diameter, allowing for small devices, and both the base and the platform have 35 mm clear apertures for shining lasers through, running cables or hoses, taking pictures, and so on. The system is controlled with only two cables, making it simple to install in tight spaces and much easier to troubleshoot and maintain.

Ease of Deployment

The HEX150-125HL is controlled through Aerotech controls and software that includes real-time visualization to improve usability and quickly teach inexperienced technicians how to operate the system. Furthermore, it is designed to be integrated with existing hardware and controls, meaning it can be rapidly deployed to expand automation systems.

Sample code for a similar Hexgen hexapod. The single quote mark ‘ indicates comments and documentation to explain the steps. Image used courtesy of Aerotech

Potential Applications

The HEX150-125HL is capable of precision alignment along six degrees of freedom. Based on this, it can be used in many automated inspection tasks. When integrated with machine vision systems or laser scanning equipment, quality assurance tasks can be performed quickly. Potentially, this can be used to characterize semiconductors during the sorting step or verify solar panels are free of defects. It could also be used to confirm measurements or feasibility of a satellite, such as a CubeSAT (10 cm x 10 cm x 10 cm in size).

Ultimately, the Aerotech HEX150-125HL is suitable for the production environment based on its ease of integration with existing automation equipment and ease of installation and programming. It is also ideal for research and development or laboratory environments due to its rapid deployment capabilities and controlled, precision motion.